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Title: Note: Fabrication of a fast-response and user-friendly environmental chamber for atomic force microscopes

The atomic force microscope is one of the most widespread tools in science, but many suppliers do not provide a competitive solution to make experiments in controlled atmospheres. Here, we provide a solution to this problem by fabricating a fast-response and user-friendly environmental chamber. We corroborate the correct functioning of the chamber by studying the formation of local anodic oxidation on a silicon sample (biased under opposite polarities), an effect that can be suppressed by measuring in a dry nitrogen atmosphere. The usefulness of this chamber goes beyond the example here presented, and it could be used in many other fields of science, including physics, mechanics, microelectronics, nanotechnology, medicine, and biology.
Authors:
; ; ; ; ; ;  [1]
  1. Institute of Functional Nano & Soft Materials, Soochow University, Collaborative Innovation Center of Suzhou Nano Science & Technology, 199 Ren-Ai Road, Suzhou 215123 (China)
Publication Date:
OSTI Identifier:
22482584
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 86; Journal Issue: 10; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ATOMIC FORCE MICROSCOPY; BIOLOGY; CONTROLLED ATMOSPHERES; DRUGS; FABRICATION; MECHANICS; MEDICINE; MICROELECTRONICS; MICROSCOPES; NANOTECHNOLOGY; NITROGEN; OXIDATION; SILICON