Broadband nanophotonic waveguides and resonators based on epitaxial GaN thin films
Abstract
We demonstrate broadband, low loss optical waveguiding in single crystalline GaN grown epitaxially on c-plane sapphire wafers through a buffered metal-organic chemical vapor phase deposition process. High Q optical microring resonators are realized in near infrared, infrared, and near visible regimes with intrinsic quality factors exceeding 50 000 at all the wavelengths we studied. TEM analysis of etched waveguide reveals growth and etch-induced defects. Reduction of these defects through improved material and device processing could lead to even lower optical losses and enable a wideband photonic platform based on GaN-on-sapphire material system.
- Authors:
- Publication Date:
- OSTI Identifier:
- 22482196
- Resource Type:
- Journal Article
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 107; Journal Issue: 14; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CRYSTAL GROWTH; DEPOSITION; EPITAXY; GALLIUM NITRIDES; MONOCRYSTALS; ORGANOMETALLIC COMPOUNDS; PROCESSING; QUALITY FACTOR; RESONATORS; SAPPHIRE; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; VAPORS; WAVEGUIDES; WAVELENGTHS
Citation Formats
Bruch, Alexander W., Xiong, Chi, Leung, Benjamin, Poot, Menno, Han, Jung, and Tang, Hong X., E-mail: hong.tang@yale.edu. Broadband nanophotonic waveguides and resonators based on epitaxial GaN thin films. United States: N. p., 2015.
Web. doi:10.1063/1.4933093.
Bruch, Alexander W., Xiong, Chi, Leung, Benjamin, Poot, Menno, Han, Jung, & Tang, Hong X., E-mail: hong.tang@yale.edu. Broadband nanophotonic waveguides and resonators based on epitaxial GaN thin films. United States. https://doi.org/10.1063/1.4933093
Bruch, Alexander W., Xiong, Chi, Leung, Benjamin, Poot, Menno, Han, Jung, and Tang, Hong X., E-mail: hong.tang@yale.edu. 2015.
"Broadband nanophotonic waveguides and resonators based on epitaxial GaN thin films". United States. https://doi.org/10.1063/1.4933093.
@article{osti_22482196,
title = {Broadband nanophotonic waveguides and resonators based on epitaxial GaN thin films},
author = {Bruch, Alexander W. and Xiong, Chi and Leung, Benjamin and Poot, Menno and Han, Jung and Tang, Hong X., E-mail: hong.tang@yale.edu},
abstractNote = {We demonstrate broadband, low loss optical waveguiding in single crystalline GaN grown epitaxially on c-plane sapphire wafers through a buffered metal-organic chemical vapor phase deposition process. High Q optical microring resonators are realized in near infrared, infrared, and near visible regimes with intrinsic quality factors exceeding 50 000 at all the wavelengths we studied. TEM analysis of etched waveguide reveals growth and etch-induced defects. Reduction of these defects through improved material and device processing could lead to even lower optical losses and enable a wideband photonic platform based on GaN-on-sapphire material system.},
doi = {10.1063/1.4933093},
url = {https://www.osti.gov/biblio/22482196},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 14,
volume = 107,
place = {United States},
year = {Mon Oct 05 00:00:00 EDT 2015},
month = {Mon Oct 05 00:00:00 EDT 2015}
}
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