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Title: Effects of defect density on ultrathin graphene-based metal diffusion barriers

The authors investigated the effects of defect density on the performance of monolayer graphene as a barrier to metal diffusion. The defects were introduced to the graphene by controlled ultraviolet-ozone irradiation. The barrier performance of pristine graphene was found to be superior to that of defective graphene at temperatures up to 700 °C. Changes in surface morphology were more prevalent in the defective graphene-based films than in the pristine graphene-based film; the thermal stability of graphene films depends on their defect density. Defect density was found to be a determining factor in the barrier performance of graphene.
Authors:
; ;  [1]
  1. Department of Chemical and Biological Engineering, Korea University, Seoul 136-701 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22479676
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 33; Journal Issue: 6; Other Information: (c) 2015 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; CRYSTAL DEFECTS; DIFFUSION BARRIERS; FILMS; GRAPHENE; IRRADIATION; METALS; MORPHOLOGY; OZONE; PERFORMANCE; STABILITY; SURFACES; ULTRAVIOLET RADIATION