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Title: The TriBeam system: Femtosecond laser ablation in situ SEM

Femtosecond laser ablation offers the unique ability to remove material at rates that are orders of magnitude faster than existing ion beam technologies with little or no associated damage. By combining ultrafast lasers with state-of-the-art electron microscopy equipment, we have developed a TriBeam system capable of targeted, in-situ tomography providing chemical, structural, and topographical information in three dimensions of near mm{sup 3} sized volumes. The origins, development, physics, current uses, and future potential for the TriBeam system are described in this tutorial review. - Graphical abstract: Display Omitted - Highlights: • An emerging tool, the TriBeam, for in situ femtosecond (fs) laser ablation is presented. • Fs laser ablation aided tomography at the mm{sup 3}-scale is demonstrated. • Fs laser induced deposition of Pt is demonstrated at sub-diffraction limit resolution. • Fs laser surface structuring is reviewed as well as micromachining applications.
Authors:
 [1] ; ; ;  [2] ;  [1]
  1. Materials Department, University of California — Santa Barbara, Santa Barbara, CA 93106-5050 (United States)
  2. FEI Company, 5350 NE Dawson Creek Drive, Hillsboro, OR 97124 (United States)
Publication Date:
OSTI Identifier:
22476026
Resource Type:
Journal Article
Resource Relation:
Journal Name: Materials Characterization; Journal Volume: 100; Other Information: Copyright (c) 2014 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ABLATION; DEPOSITION; DIFFRACTION; ION BEAMS; LASER RADIATION; MACHINING; RESOLUTION; SCANNING ELECTRON MICROSCOPY; SURFACES; TOMOGRAPHY