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Title: Modulation of microstructure and optical properties of Mo-doped ZnO thin films by substrate temperature

Highlights: • Mo-doped ZnO films are obtained by sputtering at various substrate temperatures. • High-quality MZO thin films with good crystalline have been obtained at 200 °C. • Deposition temperature affects the amount of defects in the crystalline structure - Abstract: Mo-doped ZnO(MZO) films were deposited on Si (1 1 1) substrates by radio frequency sputtering at different substrate temperatures of 200, 300 and 400 °C. The effect of the substrate temperature on the structural and optical properties of the MZO films has been investigated. X-ray diffraction results reveal that all the films are polycrystalline with a hexagonal wurtzite structure with a preferential orientation according to the direction (0 0 2) plane. The crystallinity and surface morphologies of the films are strongly dependent on the growth temperature, which in turn exerts a great effect on microstructural and optical properties of the MZO films. The optical absorption measurements show high ultraviolet (UV) absorbance property of MZO with sharp and intense absorption band in this region and the optical band gap (E{sub g}) are 3.18, 3.22, 3.25 and 3.21 eV for the films deposited at room temperature, 200, 300 and 400 °C. The photoluminescence (PL) intensity of a strong broad violet–blue emissionmore » from MZO nanostructures with increasing deposited temperature was also observed. X-ray photoelectron spectroscopy (XPS) was employed to investigate the surface chemical composition of growth products.« less
Authors:
 [1] ;  [1] ;  [2] ;  [1] ;  [3] ;  [4] ; ;  [1]
  1. School of physics and Materials Science, Anhui University, Hefei 230601 (China)
  2. (China)
  3. Key Laboratory of Materials Physics, Anhui Key Laboratory of Nanomaterials and Nanostructure, Institute of Solid State Physics, Chinese Academy of Sciences, Hefei 230031 (China)
  4. National Laboratory for Infrared Physics, Chinese Academy of Sciences, Shanghai Institute of Technical Physics, 500 Yutian Road, Shanghai 200083 (China)
Publication Date:
OSTI Identifier:
22475751
Resource Type:
Journal Article
Resource Relation:
Journal Name: Materials Research Bulletin; Journal Volume: 65; Other Information: Copyright (c) 2015 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ABSORPTION; DEFECTS; DEPOSITION; DOPED MATERIALS; MICROSTRUCTURE; MODULATION; MOLYBDENUM ADDITIONS; NANOSTRUCTURES; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; SILICON; SUBSTRATES; SURFACES; THIN FILMS; ULTRAVIOLET RADIATION; X-RAY DIFFRACTION; X-RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDES