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Title: Growth of crystalline ZnO films on the nitridated (0001) sapphire surface

The surface morphology and structure of (0001) sapphire substrates subjected to thermochemical nitridation in a mixture of N{sub 2}, CO, and H{sub 2} gases are investigated by electron and probe microscopy and X-ray and electron diffraction. It is shown that an aluminum nitride layer is formed on the substrate surface and heteroepitaxial ZnO films deposited onto such substrates by magnetron sputtering have a higher quality when compared with films grown on sapphire.
Authors:
; ; ; ; ; ; ;  [1] ; ;  [2] ; ;  [3]
  1. Russian Academy of Sciences, Shubnikov Institute of Crystallography (Russian Federation)
  2. Dagestan State University (Russian Federation)
  3. National Academy of Sciences of Ukraine, Institute for Single Crystals (Ukraine)
Publication Date:
OSTI Identifier:
22472236
Resource Type:
Journal Article
Resource Relation:
Journal Name: Crystallography Reports; Journal Volume: 60; Journal Issue: 4; Other Information: Copyright (c) 2015 Pleiades Publishing, Inc.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINIUM; CARBON MONOXIDE; COMPARATIVE EVALUATIONS; CRYSTAL GROWTH; ELECTRON DIFFRACTION; ELECTRONS; FILMS; HYDROGEN; MICROSCOPY; MIXTURES; MORPHOLOGY; NITRIDATION; SAPPHIRE; SPUTTERING; SUBSTRATES; SURFACES; X-RAY DIFFRACTION; ZINC OXIDES