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Title: Spatial distribution of the electron component parameters in the nitrogen plasma of a low-pressure electrode microwave Discharge

Spatial distributions of charged particle concentration, electron temperature, and DC potential in an electrode microwave discharge in nitrogen at a pressure of 1 Torr have been measured using the double electric probe method. It has been shown that, near the electrode/antenna, the charged particle concentration exceeds a critical value. The concentration and heterogeneity of the discharge increase with increasing microwave power.
Authors:
; ;  [1]
  1. Russian Academy of Sciences, Topchiev Institute of Petrochemical Synthesis (Russian Federation)
Publication Date:
OSTI Identifier:
22471827
Resource Type:
Journal Article
Resource Relation:
Journal Name: Plasma Physics Reports; Journal Volume: 42; Journal Issue: 1; Other Information: Copyright (c) 2016 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ANTENNAS; CHARGED PARTICLES; CONCENTRATION RATIO; ELECTRIC PROBES; ELECTRODES; ELECTRON TEMPERATURE; ELECTRONS; HIGH-FREQUENCY DISCHARGES; MICROWAVE RADIATION; NITROGEN; PLASMA; PLASMA POTENTIAL; PLASMA PRESSURE; SPATIAL DISTRIBUTION