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Title: X-ray fluorescence analysis of Ge{sub 1–x}Se{sub x}, As{sub 1–x}Se{sub x}, and Ge{sub 1–x–y}As{sub y}Se{sub x} glasses using electronic excitation

X-ray fluorescence analysis with fluorescence excitation by an electron beam with an energy of 30 kV is applied to determine the germanium, arsenic, and selenium contents in Ge{sub 1–x}Se{sub x}, As{sub 1–x}Se{sub x}, and Ge{sub 1–x–y}As{sub y}Se{sub x} glassy alloys. Using calibration dependences, the quantitative composition of the glasses is determined with an accuracy of ±0.0002 for parameters x and y in a surface layer ∼0.1 µm deep.
Authors:
 [1] ; ;  [2] ;  [1] ;  [3]
  1. Russian Academy of Sciences, Ioffe Physical–Technical Institute (Russian Federation)
  2. Alexander Herzen State Pedagogical University of Russia (Russian Federation)
  3. Mirzo Ulug’bek National University of Uzbekistan (Uzbekistan)
Publication Date:
OSTI Identifier:
22469718
Resource Type:
Journal Article
Resource Relation:
Journal Name: Semiconductors; Journal Volume: 49; Journal Issue: 10; Other Information: Copyright (c) 2015 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CALIBRATION; CONCENTRATION RATIO; ELECTRON BEAMS; EXCITATION; FLUORESCENCE; GERMANIUM ARSENIDES; GERMANIUM SELENIDES; GLASS; LAYERS; METALLIC GLASSES; SURFACES; X-RAY FLUORESCENCE ANALYSIS