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Title: Phase transformations and selective growth in YMnO{sub 3} films

An irreversible phase transformation from amorphous to crystalline orthorhombic YMnO{sub 3} (o-YMO) phase takes place in Y–Mn–O films deposited by pulsed-injection metal organic chemical vapor deposition (MOCVD) on Si(100) substrate. This phase transformation was studied through ex-situ and in-situ thermal annealings and the corresponding structural changes were analyzed by X-ray diffraction, scanning electron microscopy, transmission electron microscopy and Raman spectroscopy. It was shown that it takes place at an almost constant temperature (∼700 °C) and in a short period of time (∼min) and that the o-YMO phase thus obtained is stable at least up to 900 °C. We also demonstrate that the selective growth of amorphous, orthorhombic or hexagonal films is made possible by adapting the MOCVD temperature according to the temperature stability region of the different phases. - Graphical abstract: Temperature-dependent Raman spectra of an amorphous as-deposited Y–Mn–O film in the temperature range RT – 900 °C. The red spectrum marks the crystallization of the amorphous phase into the o-YMnO{sub 3} phase. - Highlights: • Phase transformations and selective growth in YMnO{sub 3}/Si(100) MOCVD films are studied. • Transformation from amorphous to crystalline orthorhombic YMnO{sub 3} occurs. • It takes place at an almost constant temperature (∼700 °C). •more » The orthorhombic YMnO{sub 3} phase thus obtained is stable at least up to 900 °C. • A selective growth is made possible by adapting the MOCVD temperature.« less
Authors:
 [1] ;  [2] ; ; ; ;  [1] ;  [2]
  1. Univ. Grenoble Alpes, LMGP, F-38000 Grenoble (France)
  2. (France)
Publication Date:
OSTI Identifier:
22451139
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Solid State Chemistry; Journal Volume: 220; Other Information: Copyright (c) 2014 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; ANNEALING; CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; DEPOSITS; FILMS; ORTHORHOMBIC LATTICES; PULSES; RAMAN SPECTRA; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; STABILITY; SUBSTRATES; TEMPERATURE DEPENDENCE; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION