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Title: Synchrotron x-ray diffraction study of micro-patterns obtained by spatially selective hydrogenation of GaAsN

We report a comparative synchrotron radiation x-ray diffraction study of GaAs{sub 1−y}N{sub y} micro-structures obtained by two different patterning methods: spatially selective H incorporation achieved by using H-opaque masks and spatially selective H removal attained by laser writing. These methods are emerging as original routes for fabrication of micro- and nano-structures with in-plane modulation of the bandgap energy. By measuring the out-of-plane and in-plane lattice parameters, we find that for both patterning approaches the largest part of the micro-structure volume remains tensile-strained and pseudomorphic to the substrate, regardless of the compressive-strained hydrogenated barriers. However, a larger lattice disorder is probed in the laser-written micro-structures and attributed to partial removal of H and/or strain changes at the micro-structure boundaries. This larger lattice disorder is confirmed by photoluminescence studies.
Authors:
 [1] ;  [2] ; ;  [3] ;  [1] ;  [4] ; ; ;  [5]
  1. Synchrotron SOLEIL, L'Orme des Merisiers, Saint-Aubin, BP48, 91192 Gif-sur-Yvette Cedex (France)
  2. CNR, Institute for Photonics and Nanotechnologies, via Cineto Romano 42, 00156 Roma (Italy)
  3. School of Physics and Astronomy, The University of Nottingham, NG7 2RD Nottingham (United Kingdom)
  4. (France)
  5. Department of Physics, Sapienza Università di Roma, Piazzale A. Moro 2, 00185 Roma (Italy)
Publication Date:
OSTI Identifier:
22420245
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 106; Journal Issue: 5; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; GALLIUM ARSENIDES; HYDROGEN; HYDROGENATION; MICROSTRUCTURE; NANOSTRUCTURES; NITRIDES; PHOTOLUMINESCENCE; STRAINS; SYNCHROTRON RADIATION; X-RAY DIFFRACTION