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Title: Characterization of surface modification in atomic force microscope-induced nanolithography of oxygen deficient La{sub 0.67}Ba{sub 0.33}MnO{sub 3−δ} thin films

We report our studies of the nanolithographic surface modifications induced by an Atomic Force Microscope (AFM) in epitaxial thin films of oxygen deficient Lanthanum Barium Manganese Oxide (La{sub 0.67}Ba{sub 0.33}MnO{sub 3−δ}). The pattern characteristics depend on the tip voltage, tip polarity, voltage duration, tip force, and humidity. We have used Electron Energy Dispersive X-Ray Spectroscopy (EDS) to analyze the chemical changes associated with the surface modifications produced with a negatively biased AFM tip. A significant increase in the oxygen stoichiometry for the patterned regions relative to the pristine film surface is observed. The results also indicate changes in the cation stoichiometry, specifically a decrease in the Lanthanum and Manganese concentrations and an increase in the Barium concentration in the patterned regions.
Authors:
; ; ; ; ;  [1] ;  [2]
  1. Department of Physics, Astronomy and Geosciences, Towson University, Towson MD 21043 (United States)
  2. Laboratory for Physical Sciences, 8050 Greenmead Drive, College Park, MD 20740, U.S.A (United States)
Publication Date:
OSTI Identifier:
22420208
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Advances; Journal Volume: 4; Journal Issue: 12; Other Information: (c) 2014 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ATOMIC FORCE MICROSCOPY; BARIUM; CATIONS; CONCENTRATION RATIO; ELECTRIC POTENTIAL; ELECTRONS; EPITAXY; HUMIDITY; LANTHANUM; MANGANESE; MANGANESE OXIDES; OXYGEN; SURFACES; THIN FILMS; X-RAY SPECTROSCOPY