Order within disorder: The atomic structure of ion-beam sputtered amorphous tantala (a-Ta{sub 2}O{sub 5})
- E. L. Ginzton Laboratory, Stanford University, Stanford, California 94305 (United States)
- LIGO Laboratory, California Institute of Technology, Pasadena, California 91125 (United States)
- Department of Geological and Environmental Sciences, Stanford University, Stanford, California 94305 (United States)
- Stanford Synchrotron Radiation Lightsource, SLAC National Accelerator Laboratory, Menlo Park, California 94025 (United States)
- SUPA, School of Physics and Astronomy, University of Glasgow, Glasgow G12 8QQ (United Kingdom)
Amorphous tantala (a-Ta{sub 2}O{sub 5}) is a technologically important material often used in high-performance coatings. Understanding this material at the atomic level provides a way to further improve performance. This work details extended X-ray absorption fine structure measurements of a-Ta{sub 2}O{sub 5} coatings, where high-quality experimental data and theoretical fits have allowed a detailed interpretation of the nearest-neighbor distributions. It was found that the tantalum atom is surrounded by four shells of atoms in sequence; oxygen, tantalum, oxygen, and tantalum. A discussion is also included on how these models can be interpreted within the context of published crystalline Ta{sub 2}O{sub 5} and other a-T{sub 2}O{sub 5} studies.
- OSTI ID:
- 22415258
- Journal Information:
- APL materials, Vol. 3, Issue 3; Other Information: (c) 2015 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 2166-532X
- Country of Publication:
- United States
- Language:
- English
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