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Title: Electrode size and boundary condition independent measurement of the effective piezoelectric coefficient of thin films

The determination of the piezoelectric coefficient of thin films using interferometry is hindered by bending contributions. Using finite element analysis (FEA) simulations, we show that the Lefki and Dormans approximations using either single or double-beam measurements cannot be used with finite top electrode sizes. We introduce a novel method for characterising piezoelectric thin films which uses a differential measurement over the discontinuity at the electrode edge as an internal reference, thereby eliminating bending contributions. This step height is shown to be electrode size and boundary condition independent. An analytical expression is derived which gives good agreement with FEA predictions of the step height.
Authors:
; ; ; ;  [1] ;  [1] ;  [2] ; ;  [3]
  1. National Physical Laboratory, Teddington, Middlesex TW11 0LW (United Kingdom)
  2. (United Kingdom)
  3. IBM Research Division, T. J. Watson Research Centre, Yorktown Heights, New York 10598 (United States)
Publication Date:
OSTI Identifier:
22415252
Resource Type:
Journal Article
Resource Relation:
Journal Name: APL materials; Journal Volume: 3; Journal Issue: 2; Other Information: (c) 2015 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; APPROXIMATIONS; BOUNDARY CONDITIONS; COMPUTERIZED SIMULATION; ELECTRODES; FINITE ELEMENT METHOD; INTERFEROMETRY; PIEZOELECTRICITY; THIN FILMS