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Title: Complex oxide growth using simultaneous in situ reflection high-energy electron diffraction and x-ray reflectivity: When is one layer complete?

During layer-by-layer homoepitaxial growth, both the Reflection High-Energy Electron Diffraction (RHEED) intensity and the x-ray reflection intensity will oscillate, and each complete oscillation indicates the addition of one monolayer of material. However, it is well documented, but not well understood, that the phase of the RHEED oscillations varies from growth to growth and thus the maxima in the RHEED intensity oscillations do not necessarily occur at the completion of a layer. We demonstrate this by using simultaneous in situ x-ray reflectivity and RHEED to characterize layer-by-layer growth of SrTiO{sub 3}. We show that we can control the RHEED oscillation phase by changing the pre-growth substrate annealing conditions, changing the RHEED oscillation phase by as much as 137°. In addition, during growth via pulsed laser deposition, the relaxation times between each laser pulse can be used to determine when a layer is complete, independent of the phase of the RHEED oscillation.
Authors:
 [1] ;  [2] ; ;  [3] ;  [4] ;  [1] ;  [2] ;  [3] ;  [2] ;  [4] ;  [2]
  1. Department of Physics and Astronomy, Ithaca College, Ithaca, New York 14850 (United States)
  2. (United States)
  3. Cornell High Energy Synchrotron Source, Cornell University, Ithaca, New York 14853 (United States)
  4. School of Applied and Engineering Physics, Cornell University, Ithaca, New York 14853 (United States)
Publication Date:
OSTI Identifier:
22415129
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 106; Journal Issue: 3; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ANNEALING; ELECTRON DIFFRACTION; ENERGY BEAM DEPOSITION; LASER RADIATION; LAYERS; OXIDES; PULSED IRRADIATION; REFLECTION; REFLECTIVITY; STRONTIUM TITANATES; SUBSTRATES; X RADIATION