skip to main content

SciTech ConnectSciTech Connect

Title: Experimental evidence of warm electron populations in magnetron sputtering plasmas

This work report on the results obtained using the Langmuir probe (LP) measurements in high-power dc magnetron sputtering discharges. Data show clear evidence of two electron components, such as warm and bulk electrons, in the sputtering plasma in a magnetic trap. We have also used optical emission spectroscopy diagnostic method along with LP to investigate the plasma production. Data show that there is a presence of low-frequency oscillations in the 2–3 MHz range, which are expected to be generated by high-frequency waves. Analysis also suggests that the warm electrons, in the plasmas, can be formed due to the collisionless Landau damping of the bulk electrons.
Authors:
; ;  [1] ; ;  [2]
  1. NU-SKKU Joint Institute Plasma-Nano Materials (IPNM), Center for Advance Plasma Surface Technology (CAPST), School of Materials Science and Engineering, Sungkyunkwan University, Suwon (Korea, Republic of)
  2. Plama Nanotechnology Research Center, Nagoya University, Nagoya (Japan)
Publication Date:
OSTI Identifier:
22412952
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 117; Journal Issue: 3; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ELECTRIC DISCHARGES; ELECTRONS; EMISSION SPECTROSCOPY; LANDAU DAMPING; LANGMUIR PROBE; MAGNETRONS; MHZ RANGE; OSCILLATIONS; PLASMA DIAGNOSTICS; PLASMA PRODUCTION; SPUTTERING; TRAPS