skip to main content

Title: Kelvin probe characterization of buried graphitic microchannels in single-crystal diamond

In this work, we present an investigation by Kelvin Probe Microscopy (KPM) of buried graphitic microchannels fabricated in single-crystal diamond by direct MeV ion microbeam writing. Metal deposition of variable-thickness masks was adopted to implant channels with emerging endpoints and high temperature annealing was performed in order to induce the graphitization of the highly-damaged buried region. When an electrical current was flowing through the biased buried channel, the structure was clearly evidenced by KPM maps of the electrical potential of the surface region overlying the channel at increasing distances from the grounded electrode. The KPM profiling shows regions of opposite contrast located at different distances from the endpoints of the channel. This effect is attributed to the different electrical conduction properties of the surface and of the buried graphitic layer. The model adopted to interpret these KPM maps and profiles proved to be suitable for the electronic characterization of buried conductive channels, providing a non-invasive method to measure the local resistivity with a micrometer resolution. The results demonstrate the potential of the technique as a powerful diagnostic tool to monitor the functionality of all-carbon graphite/diamond devices to be fabricated by MeV ion beam lithography.
Authors:
; ; ;  [1] ;  [2] ;  [3] ;  [4]
  1. Physics Department, CNISM and “NIS” Inter-departmental Centre, University of Torino, Torino (Italy)
  2. (INFN), Sezione di Torino, Torino (Italy)
  3. Istituto Nazionale di Fisica Nucleare (INFN), Sezione di Torino, Torino (Italy)
  4. (Italy)
Publication Date:
OSTI Identifier:
22412826
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 117; Journal Issue: 2; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ANNEALING; DEPOSITION; DIAMONDS; ELECTRIC CURRENTS; GRAPHITE; GRAPHITIZATION; ION BEAMS; ION IMPLANTATION; LAYERS; METALS; MEV RANGE; MICROSCOPY; MONOCRYSTALS; PROBES; RESOLUTION; SURFACES