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Title: Spatial filter based light-sheet laser interference technique for three-dimensional nanolithography

We propose a laser interference technique for the fabrication of 3D nano-structures. This is possible with the introduction of specialized spatial filter in a 2π cylindrical lens system (consists of two opposing cylindrical lens sharing a common geometrical focus). The spatial filter at the back-aperture of a cylindrical lens gives rise to multiple light-sheet patterns. Two such interfering counter-propagating light-sheet pattern result in periodic 3D nano-pillar structure. This technique overcomes the existing slow point-by-point scanning, and has the ability to pattern selectively over a large volume. The proposed technique allows large-scale fabrication of periodic structures. Computational study shows a field-of-view (patterning volume) of approximately 12.2 mm{sup 3} with the pillar-size of 80 nm and inter-pillar separation of 180 nm. Applications are in nano-waveguides, 3D nano-electronics, photonic crystals, and optical microscopy.
Authors:
 [1] ;  [1] ;  [2]
  1. Nanobioimaging Laboratory, Department of Instrumentation and Applied Physics, Indian Institute of Science, Bangalore 560012 (India)
  2. (India)
Publication Date:
OSTI Identifier:
22412719
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 106; Journal Issue: 8; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; APERTURES; APPROXIMATIONS; CRYSTALS; CYLINDRICAL CONFIGURATION; FABRICATION; FILTERS; INTERFERENCE; LASERS; LENSES; NANOSTRUCTURES; OPTICAL MICROSCOPY; PERIODICITY; SHEETS; THREE-DIMENSIONAL CALCULATIONS; THREE-DIMENSIONAL LATTICES; VISIBLE RADIATION; WAVEGUIDES