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Title: Aberration corrected 1.2-MV cold field-emission transmission electron microscope with a sub-50-pm resolution

Atomic-resolution electromagnetic field observation is critical to the development of advanced materials and to the unveiling of their fundamental physics. For this purpose, a spherical-aberration corrected 1.2-MV cold field-emission transmission electron microscope has been developed. The microscope has the following superior properties: stabilized accelerating voltage, minimized electrical and mechanical fluctuation, and coherent electron emission. These properties have enabled to obtain 43-pm information transfer. On the bases of these performances, a 43-pm resolution has been obtained by correcting lens aberrations up to the third order. Observations of GaN [411] thin crystal showed a projected atomic locations with a separation of 44 pm.
Authors:
; ; ; ; ; ; ;  [1] ; ;  [2] ;  [1] ;  [3]
  1. Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395 (Japan)
  2. Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126 Heidelberg (Germany)
  3. (CEMS), Wako 351-0198 (Japan)
Publication Date:
OSTI Identifier:
22412671
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 106; Journal Issue: 7; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CRYSTAL STRUCTURE; CRYSTALS; ELECTRIC POTENTIAL; ELECTROMAGNETIC FIELDS; ELECTRON EMISSION; FIELD EMISSION; FLUCTUATIONS; GALLIUM NITRIDES; GEOMETRICAL ABERRATIONS; LENSES; PERFORMANCE; TRANSMISSION ELECTRON MICROSCOPY