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Title: A variable-width harmonic probe for multifrequency atomic force microscopy

In multifrequency atomic force microscopy (AFM) to simultaneously measure topography and material properties of specimens, it is highly desirable that the higher order resonance frequencies of the cantilever probe are assigned to be integer harmonics of the excitation frequency. The harmonic resonances are essential for significant enhancement of the probe's response at the specified harmonic frequencies. In this letter, a structural optimization technique is employed to design cantilever probes so that the ratios between one or more higher order resonance frequencies and the fundamental natural frequency are ensured to be equal to specified integers and, in the meantime, that the fundamental natural frequency is maximized. Width profile of the cantilever probe is the design variable in optimization. Thereafter, the probes were prepared by modifying a commercial probe through the focused ion beam (FIB) milling. The resonance frequencies of the FIB fabricated probes were measured with an AFM. Results of the measurement show that the optimal design of probe is as effective as design prediction.
Authors:
;  [1] ;  [2] ;  [3] ;  [1] ;  [4]
  1. Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Shatin, NT (Hong Kong)
  2. State Key Laboratory of Digital Manufacturing Equipment of Technology, Huazhong University of Science and Technology, Wuhan 430074 (China)
  3. State Key Laboratory of Structural Analysis for Industrial Equipment, Dalian University of Technology, Dalian 116024 (China)
  4. (Singapore)
Publication Date:
OSTI Identifier:
22412648
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 106; Journal Issue: 7; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ATOMIC FORCE MICROSCOPY; EXCITATION; HARMONICS; ION BEAMS; OPTIMIZATION; PROBES; RESONANCE; TOPOGRAPHY