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Title: Characteristics of anomalous skin effect and evolution of power absorption regions in a cylindrical radio frequency inductively coupled plasma

In a low-pressure radio-frequency (13.56 MHz), inductively coupled argon plasma generated by a normal cylindrical rf coil, electric field, current density, and absorbed power density is calculated from magnetic field measured with a phase-resolved magnetic probe. The anomalous skin effect (ASE) for the cylindrical rf coil is compared to those previously reported for the planar and re-entrant cylindrical rf coils. Physical reasons for our observed characteristics of ASE are presented. With the increasing discharge power, the size and the number of negative and positive power absorption regions evolve into several distinct patterns. For the low discharge power (at 156.9 W), there is one area of positive and one area of negative power absorption in the radial direction. For the medium discharge power (279 W–683.5 W), there are two areas of negative and two areas of positive power absorption. For the even higher discharge power (above 803.5 W), the number of areas is the same as that of the medium discharge power, but the size of the inner positive and negative power absorption areas is approximately doubled and halved, respectively, while the outer positive and negative power absorption areas slightly shrinks. The evolution of positive and negative power absorption regions is explained as a resultmore » of electron thermal diffusion and the energy conversion between rf current and electric field. The spatial decays of electric field and current density are also elucidated by linking them with the positive and negative power absorption pattern.« less
Authors:
 [1] ;  [1] ;  [2] ;  [1] ;  [2]
  1. Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023 (China)
  2. (China)
Publication Date:
OSTI Identifier:
22410458
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 22; Journal Issue: 6; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ABSORPTION; ARGON; CURRENT DENSITY; CYLINDRICAL CONFIGURATION; ELECTRIC DISCHARGES; ELECTRIC FIELDS; ELECTRONS; ENERGY CONVERSION; MAGNETIC FIELDS; MAGNETIC PROBES; MHZ RANGE; PLASMA; POWER DENSITY; PRESSURE RANGE KILO PA; RADIOWAVE RADIATION; SKIN EFFECT; THERMAL DIFFUSION