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Title: Effects of argon gas pressure on its metastable-state density in high-density plasmas

The effect of argon gas pressure on its metastable density in inductively coupled plasmas (ICPs) is investigated by using the laser-induced fluorescence method. Our results show that the metastable-state density of argon varies with the gas pressure depending on the measurement position; the density decreases with the pressure at a position far from the ICP antenna, whereas it increases with the pressure at a position near the antenna. This contrast in the metastable-state density trend with the pressure is explained by considering the electron temperature variations at the two measurement positions. The theoretical interpretation and calculation using a global model are also addressed in detail in this paper.
Authors:
;  [1] ;  [2]
  1. Center for Vacuum Technology, Korea Research Institute of Standards and Science, Daejeon 305-306 (Korea, Republic of)
  2. Department of Physics, Chungnam National University, Daejeon 305-764 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22410358
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 22; Journal Issue: 5; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ANTENNAS; ARGON; ELECTRON TEMPERATURE; FLUORESCENCE; LASERS; METASTABLE STATES; PLASMA DENSITY