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Title: Temperature-dependent mechanical deformation of silicon at the nanoscale: Phase transformation versus defect propagation

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.4921534· OSTI ID:22410266
; ; ; ;  [1];  [1]
  1. Department of Electronic Materials Engineering, Research School of Physics and Engineering, Australian National University, Australian Capital Territory, Canberra 2601 (Australia)

This study uses high-temperature nanoindentation coupled with in situ electrical measurements to investigate the temperature dependence (25–200 °C) of the phase transformation behavior of diamond cubic (dc) silicon at the nanoscale. Along with in situ indentation and electrical data, ex situ characterizations, such as Raman and cross-sectional transmission electron microscopy, have been used to reveal the indentation-induced deformation mechanisms. We find that phase transformation and defect propagation within the crystal lattice are not mutually exclusive deformation processes at elevated temperature. Both can occur at temperatures up to 150 °C but to different extents, depending on the temperature and loading conditions. For nanoindentation, we observe that phase transformation is dominant below 100 °C but that deformation by twinning along (111) planes dominates at 150 °C and 200 °C. This work, therefore, provides clear insight into the temperature dependent deformation mechanisms in dc-Si at the nanoscale and helps to clarify previous inconsistencies in the literature.

OSTI ID:
22410266
Journal Information:
Journal of Applied Physics, Vol. 117, Issue 20; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
Country of Publication:
United States
Language:
English

Cited By (5)

The high pressure phase transformation behavior of silicon nanowires journal September 2018
In-situ high temperature micro-Raman investigation of annealing behavior of high-pressure phases of Si journal June 2019
Temperature-dependent nanoindentation response of materials journal February 2018
Nanoindentation Induced Deformation and Pop-in Events in a Silicon Crystal: Molecular Dynamics Simulation and Experiment journal August 2017
Extended Applications of the Depth-Sensing Indentation Method journal November 2020