skip to main content

Title: On uniform plasma generation for the large area plasma processing in intermediate pressures

Radial plasma discharge characteristics in the range of 450 mm were studied in a dual inductively coupled plasma (ICP) source, which consisted of a helical ICP and the side type ferrite ICPs. Since the energy relaxation length is shorter than the distance between each of the ferrite ICPs in an intermediate pressure (600 mTorr), local difference in the plasma ignition along the antenna position were observed. In addition, large voltage drop in the discharge of the ferrite ICPs causes an increase in the displacement current to the plasma, and separate discharge mode (E and H mode) according to the antenna position was observed. This results in non-uniform plasma distribution. For the improvement in the discharge of the ferrite ICPs, a capacitor which is placed between the ends of antenna and the ground is adjusted to minimize the displacement current to the plasma. As a result, coincident transitions from E to H mode were observed along the antenna position, and radially concave density profile (edge focused) was measured. For the uniform density distribution, a helical ICP, which located at the center of the discharge chamber, was simultaneously discharged with the ferrite ICPs. Due to the plasma potential variation through the simultaneous dischargemore » of helical ICP and ferrite ICPs, uniform radial distribution in both plasma density and electron temperature are achieved.« less
Authors:
 [1] ;  [2] ; ; ;  [3] ;  [4] ;  [1]
  1. Department of Electrical Engineering, Hanyang University, Seoul 133-791 (Korea, Republic of)
  2. (Korea, Republic of)
  3. R and D Center for PSK-INC Corporation, Hwaseong-si 445-170 (Korea, Republic of)
  4. Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22405045
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 117; Journal Issue: 15; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ANTENNAS; CAPACITORS; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTRON TEMPERATURE; FERRITE; H-MODE PLASMA CONFINEMENT; PLASMA; PLASMA DENSITY; RELAXATION; SPATIAL DISTRIBUTION; VOLTAGE DROP