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Title: Particle visualization in high-power impulse magnetron sputtering. II. Absolute density dynamics

Time-resolved characterization of an Ar-Ti high-power impulse magnetron sputtering discharge has been performed. The present, second, paper of the study is related to the discharge characterization in terms of the absolute density of species using resonant absorption spectroscopy. The results on the time-resolved density evolution of the neutral and singly-ionized Ti ground state atoms as well as the metastable Ti and Ar atoms during the discharge on- and off-time are presented. Among the others, the questions related to the inversion of population of the Ti energy sublevels, as well as to re-normalization of the two-dimensional density maps in terms of the absolute density of species, are stressed.
Authors:
; ;  [1] ;  [1] ;  [2]
  1. Chimie des Interactions Plasma-Surface (ChIPS), CIRMAP, Université de Mons, 23 Place du Parc, B-7000 Mons (Belgium)
  2. (Belgium)
Publication Date:
OSTI Identifier:
22402907
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 117; Journal Issue: 16; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ABSORPTION SPECTROSCOPY; ARGON; ATOMS; DENSITY; ELECTROMAGNETIC PULSES; GROUND STATES; IONIZATION; MAGNETRONS; METASTABLE STATES; PARTICLES; RENORMALIZATION; SPUTTERING; TIME RESOLUTION; TITANIUM; TWO-DIMENSIONAL SYSTEMS