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Title: Particle visualization in high-power impulse magnetron sputtering. I. 2D density mapping

Time-resolved characterization of an Ar-Ti high-power impulse magnetron sputtering discharge has been performed. This paper deals with two-dimensional density mapping in the discharge volume obtained by laser-induced fluorescence imaging. The time-resolved density evolution of Ti neutrals, singly ionized Ti atoms (Ti{sup +}), and Ar metastable atoms (Ar{sup met}) in the area above the sputtered cathode is mapped for the first time in this type of discharges. The energetic characteristics of the discharge species are additionally studied by Doppler-shift laser-induced fluorescence imaging. The questions related to the propagation of both the neutral and ionized discharge particles, as well as to their spatial density distributions, are discussed.
Authors:
; ;  [1] ;  [1] ;  [2]
  1. Chimie des Interactions Plasma-Surface (ChIPS), CIRMAP, Université de Mons, 23 Place du Parc, B-7000 Mons (Belgium)
  2. (Belgium)
Publication Date:
OSTI Identifier:
22402906
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 117; Journal Issue: 16; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ARGON; ATOMS; DENSITY; DOPPLER EFFECT; ELECTROMAGNETIC PULSES; FLUORESCENCE; MAGNETRONS; MAPPING; METASTABLE STATES; PARTICLES; SPUTTERING; TIME RESOLUTION; TITANIUM; TWO-DIMENSIONAL SYSTEMS