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Title: High quality HfO{sub 2}/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8 nm equivalent oxide thickness

We investigate in-situ cleaning of GaSb surfaces and its effect on the electrical performance of p-type GaSb metal-oxide-semiconductor capacitor (MOSCAP) using a remote hydrogen plasma. Ultrathin HfO{sub 2} films grown by atomic layer deposition were used as a high permittivity gate dielectric. Compared to conventional ex-situ chemical cleaning methods, the in-situ GaSb surface treatment resulted in a drastic improvement in the impedance characteristics of the MOSCAPs, directly evidencing a much lower interface trap density and enhanced Fermi level movement efficiency. We demonstrate that by using a combination of ex-situ and in-situ surface cleaning steps, aggressively scaled HfO{sub 2}/p-GaSb MOSCAP structures with a low equivalent oxide thickness of 0.8 nm and efficient gate modulation of the surface potential are achieved, allowing to push the Fermi level far away from the valence band edge high up into the band gap of GaSb.
Authors:
;  [1] ;  [2] ; ;  [3] ;  [4] ;  [5]
  1. Department of Electrical Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802 (United States)
  2. Kurt J. Lesker Company, Pittsburgh, Pennsylvania 15025 (United States)
  3. Department of Materials Science and Engineering, University of Texas at Dallas, Richardson, Texas 75080 (United States)
  4. Naval Research Laboratory, Washington, DC 20357 (United States)
  5. Department of Material Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802 (United States)
Publication Date:
OSTI Identifier:
22402402
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 105; Journal Issue: 22; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CAPACITORS; DIELECTRIC MATERIALS; EFFICIENCY; FERMI LEVEL; FILMS; GALLIUM ANTIMONIDES; HAFNIUM OXIDES; HYDROGEN; IMPEDANCE; METALS; SEMICONDUCTOR MATERIALS; SURFACE CLEANING; SURFACE TREATMENTS; SURFACES; THICKNESS