skip to main content

Title: Stabilizing shallow color centers in diamond created by nitrogen delta-doping using SF{sub 6} plasma treatment

Here we report the fabrication of stable, shallow (<5 nm) nitrogen-vacancy (NV) centers in diamond by nitrogen delta doping at the last stage of the chemical vapor deposition growth process. The NVs are stabilized after treating the diamond in SF{sub 6} plasma, otherwise the color centers are not observed, suggesting a strong influence from the surface. X-ray photoelectron spectroscopy measurements show the presence of only fluorine atoms on the surface, in contrast to previous studies, indicating very good surface coverage. We managed to detect hydrogen nuclear magnetic resonance signal from protons in the immersion oil, revealing a depth of the NVs of about 5 nm.
Authors:
; ; ; ; ; ;  [1] ; ;  [2]
  1. Institut für Quantenoptik, Universität Ulm, Albert Einstein Allee 11, Ulm 89081 (Germany)
  2. Institut für Oberflächenchemie und Katalyse, Universität Ulm, Albert-Einstein-Allee 47, Ulm 89081 (Germany)
Publication Date:
OSTI Identifier:
22395771
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 106; Journal Issue: 11; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ATOMS; CHEMICAL VAPOR DEPOSITION; COLOR CENTERS; DIAMONDS; FABRICATION; FLUORINE; HYDROGEN; NITROGEN; NUCLEAR MAGNETIC RESONANCE; PLASMA; PROTONS; SULFUR FLUORIDES; SURFACES; VACANCIES; X-RAY PHOTOELECTRON SPECTROSCOPY