Stabilizing shallow color centers in diamond created by nitrogen delta-doping using SF{sub 6} plasma treatment

Journal Article · Mon Mar 16 00:00:00 EDT 2015 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4915305· OSTI ID:22395771

Osterkamp, Christian; Lang, Johannes; Scharpf, Jochen; Müller, Christoph; McGuinness, Liam Paul; Naydenov, Boris; Jelezko, Fedor ^[1]; Diemant, Thomas; Behm, R. Jürgen ^[2]

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1. Institut für Quantenoptik, Universität Ulm, Albert Einstein Allee 11, Ulm 89081 (Germany)
2. Institut für Oberflächenchemie und Katalyse, Universität Ulm, Albert-Einstein-Allee 47, Ulm 89081 (Germany)

Here we report the fabrication of stable, shallow (<5 nm) nitrogen-vacancy (NV) centers in diamond by nitrogen delta doping at the last stage of the chemical vapor deposition growth process. The NVs are stabilized after treating the diamond in SF{sub 6} plasma, otherwise the color centers are not observed, suggesting a strong influence from the surface. X-ray photoelectron spectroscopy measurements show the presence of only fluorine atoms on the surface, in contrast to previous studies, indicating very good surface coverage. We managed to detect hydrogen nuclear magnetic resonance signal from protons in the immersion oil, revealing a depth of the NVs of about 5 nm.

• OSTI ID: 22395771
• Journal Information: Applied Physics Letters, Vol. 106, Issue 11; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ATOMS
CHEMICAL VAPOR DEPOSITION
COLOR CENTERS
DIAMONDS
FABRICATION
FLUORINE
HYDROGEN
NITROGEN
NUCLEAR MAGNETIC RESONANCE
PLASMA
PROTONS
SULFUR FLUORIDES
SURFACES
VACANCIES
X-RAY PHOTOELECTRON SPECTROSCOPY