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Title: Spectroscopic and electrical calculation of band alignment between atomic layer deposited SiO{sub 2} and β-Ga{sub 2}O{sub 3} (2{sup ¯}01)

The energy band alignment between atomic layer deposited (ALD) SiO{sub 2} and β-Ga{sub 2}O{sub 3} (2{sup ¯}01) is calculated using x-ray photoelectron spectroscopy and electrical measurement of metal-oxide semiconductor capacitor structures. The valence band offset between SiO{sub 2} and Ga{sub 2}O{sub 3} is found to be 0.43 eV. The bandgap of ALD SiO{sub 2} was determined to be 8.6 eV, which gives a large conduction band offset of 3.63 eV between SiO{sub 2} and Ga{sub 2}O{sub 3}. The large conduction band offset makes SiO{sub 2} an attractive gate dielectric for power devices.
Authors:
; ;  [1] ; ;  [2]
  1. Electrical Engineering Department, University at Buffalo, Buffalo, New York 14260 (United States)
  2. Chemistry Department, University at Buffalo, Buffalo, New York 14260 (United States)
Publication Date:
OSTI Identifier:
22395710
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 106; Journal Issue: 10; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CAPACITORS; DEPOSITION; DIELECTRIC MATERIALS; ELECTRONIC STRUCTURE; ENERGY GAP; EV RANGE; GALLIUM OXIDES; LAYERS; METALS; SEMICONDUCTOR MATERIALS; SILICA; SILICON OXIDES; VALENCE; X-RAY PHOTOELECTRON SPECTROSCOPY