Derivation of effective penetration depth of femtosecond laser pulses in metal from ablation rate dependence on laser fluence, incidence angle, and polarization
- Advanced Research Center for Beam Science, Institute for Chemical Research, Kyoto University, Gokasho, Uji, Kyoto 611-0011, Japan and Department of Physics, Graduate School of Science, Kyoto University, Kitashirakawa, Sakyo, Kyoto 606-8502 (Japan)
Ablation rate dependence on laser fluence for copper subjected to oblique femtosecond laser irradiation has been determined experimentally in order to investigate processing induced by oblique irradiation. A difference of ablation rate between p-polarized and s-polarized oblique irradiation is clearly observed. Effective penetration depth is defined to explain the ablation rate dependence instead of using optical penetration depth, which is treated as a key value for determining the ablation rate in conventional theory. The effective penetration depth for copper is presented in simple formulas as a function of laser incidence angle for each polarization.
- OSTI ID:
- 22395663
- Journal Information:
- Applied Physics Letters, Vol. 106, Issue 1; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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