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Title: Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering

The fundamental question of how energy is supplied to a magnetron discharge is commonly answered by the Penning-Thornton paradigm invoking secondary electrons. Recently, Huo and coworkers (Plasma Sources Sci. Technol. 22, 045005 (2013)) used a global discharge model to show that electron heating in the electric field of the magnetic presheath is dominant over heating by secondary electrons. In this contribution, this concept is applied locally taking into account the electric potential structure of ionization zones. Images of ionization zones can and should be interpreted as diagrams of the localization of high electric potential and related electron energy.
Authors:
 [1]
  1. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720 (United States)
Publication Date:
OSTI Identifier:
22395571
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 105; Journal Issue: 24; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRONS; HEATING; MAGNETRONS; PENNING DISCHARGES; PLASMA; PLASMA SHEATH; SPUTTERING; ZONES