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Title: Sub-micrometer resolution proximity X-ray microscope with digital image registration

A compact laboratory proximity soft X-ray microscope providing submicrometer spatial resolution and digital image registration is described. The microscope consists of a laser-plasma soft X-ray radiation source, a Schwarzschild objective to illuminate the test sample, and a two-coordinate detector for image registration. Radiation, which passes through the sample under study, generates an absorption image on the front surface of the detector. Optical ceramic YAG:Ce was used to convert the X-rays into visible light. An image was transferred from the scintillator to a charge-coupled device camera with a Mitutoyo Plan Apo series lens. The detector’s design allows the use of lenses with numerical apertures of NA = 0.14, 0.28, and 0.55 without changing the dimensions and arrangement of the elements of the device. This design allows one to change the magnification, spatial resolution, and field of view of the X-ray microscope. A spatial resolution better than 0.7 μm and an energy conversion efficiency of the X-ray radiation with a wavelength of 13.5 nm into visible light collected by the detector of 7.2% were achieved with the largest aperture lens.
Authors:
; ; ;  [1] ; ;  [2]
  1. Institute for Physics of Microstructures of the Russian Academy of Sciences, GSP-105, 603087 Nizhny Novgorod (Russian Federation)
  2. Nizhny Novgorod N. I. Lobachevskii State University, Gagarina Ave. 23, 603950 Nizhny Novgorod (Russian Federation)
Publication Date:
OSTI Identifier:
22392532
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 86; Journal Issue: 6; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ABSORPTION; APERTURES; CAMERAS; CERAMICS; CHARGE-COUPLED DEVICES; DESIGN; IMAGES; LENSES; MICROSCOPES; NEODYMIUM LASERS; PLASMA; RADIATION SOURCES; SOFT X RADIATION; SPATIAL RESOLUTION; SURFACES; WAVELENGTHS