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Title: Magnetized retarding field energy analyzer measuring the particle flux and ion energy distribution of both positive and negative ions

This paper presents the development of a magnetized retarding field energy analyzer (MRFEA) used for positive and negative ion analysis. The two-stage analyzer combines a magnetic electron barrier and an electrostatic ion energy barrier allowing both positive and negative ions to be analyzed without the influence of electrons (co-extracted or created downstream). An optimal design of the MRFEA for ion-ion beams has been achieved by a comparative study of three different MRFEA configurations, and from this, scaling laws of an optimal magnetic field strength and topology have been deduced. The optimal design consists of a uniform magnetic field barrier created in a rectangular channel and an electrostatic barrier consisting of a single grid and a collector placed behind the magnetic field. The magnetic barrier alone provides an electron suppression ratio inside the analyzer of up to 6000, while keeping the ion energy resolution below 5 eV. The effective ion transparency combining the magnetic and electrostatic sections of the MRFEA is measured as a function of the ion energy. It is found that the ion transparency of the magnetic barrier increases almost linearly with increasing ion energy in the low-energy range (below 200 eV) and saturates at high ion energies. Themore » ion transparency of the electrostatic section is almost constant and close to the optical transparency of the entrance grid. We show here that the MRFEA can provide both accurate ion flux and ion energy distribution measurements in various experimental setups with ion beams or plasmas run at low pressure and with ion energies above 10 eV.« less
Authors:
;  [1] ;  [2]
  1. Laboratoire de Physique des Plasmas (CNRS, Ecole Polytechnique, Sorbonne Universit├ęs, UPMC Univ Paris 06, Univ Paris-Sud), Ecole Polytechnique, 91128 Palaiseau (France)
  2. Department of Physics and Technology, V.N. Karazin Kharkiv National University, 61022 Kharkiv (Ukraine)
Publication Date:
OSTI Identifier:
22392493
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 86; Journal Issue: 5; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ANIONS; ENERGY SPECTRA; EV RANGE 01-10; GRIDS; ION BEAMS; MAGNETIC FIELDS; OPACITY; VENTILATION BARRIERS