A beam-membrane structure micromachined differential pressure flow sensor

Journal Article · Wed Apr 15 00:00:00 EDT 2015 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4919282· OSTI ID:22392473

Chen, P.; Zhao, Y. L.; Li, C.; Li, Y. Y. ^[1]

---

1. State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an (China)

A beam-membrane structure micromachined flow sensor is designed, depending on the principle of differential pressure caused by the mass flow, which is directly proportional to the square flow rate. The FSI (fluid structure interaction) characteristics of the differential pressure flow sensor are investigated via numerical analysis and analog simulation. The working mechanism of the flow sensor is analyzed depending on the FSI results. Then, the flow sensor is fabricated and calibrated. The calibration results show that the beam-membrane structure differential pressure flow sensor achieves ideal static characteristics and works well in the practical applications.

• OSTI ID: 22392473
• Journal Information: Review of Scientific Instruments, Vol. 86, Issue 4; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
BEAMS
CALIBRATION
DESIGN
FLOW RATE
FLUID-STRUCTURE INTERACTIONS
MEMBRANES
NUMERICAL ANALYSIS
SENSORS
SIMULATION