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Title: Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors

An adaptive Kirkpatrick–Baez mirror focusing optics based on piezoelectric deformable mirrors was constructed at SPring-8 and its focusing performance characteristics were demonstrated. By adjusting the voltages applied to the deformable mirrors, the shape errors (compared to a target elliptical shape) were finely corrected on the basis of the mirror shape determined using the pencil-beam method, which is a type of at-wavelength figure metrology in the X-ray region. The mirror shapes were controlled with a peak-to-valley height accuracy of 2.5 nm. A focused beam with an intensity profile having a full width at half maximum of 110 × 65 nm (V × H) was achieved at an X-ray energy of 10 keV.
Authors:
; ; ;  [1] ;  [2] ; ; ; ;  [3] ;  [1] ;  [4] ;  [4]
  1. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
  2. Research Institute for Electronic Science, Hokkaido University, Kita 21 Nishi 10, Kita-ku, Sapporo 001-0021 (Japan)
  3. SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5198 (Japan)
  4. (Japan)
Publication Date:
OSTI Identifier:
22392437
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 86; Journal Issue: 4; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ACCURACY; COMPARATIVE EVALUATIONS; ELECTRIC POTENTIAL; ERRORS; FOCUSING; HARD X RADIATION; MIRRORS; OPTICS; PEAKS; PERFORMANCE; PIEZOELECTRICITY; SHAPE; SPRING-8 STORAGE RING; WAVELENGTHS