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Title: A compact time-of-flight mass spectrometer for ion source characterization

A compact time-of-flight mass spectrometer with overall dimension of about 413 × 250 × 414 mm based on orthogonal injection and angle reflection has been developed for ion source characterization. Configuration and principle of the time-of-flight mass spectrometer are introduced in this paper. The mass resolution is optimized to be about 1690 (FWHM), and the ion energy detection range is tested to be between about 3 and 163 eV with the help of electron impact ion source. High mass resolution and compact configuration make this spectrometer useful to provide a valuable diagnostic for ion spectra fundamental research and study the mass to charge composition of plasma with wide range of parameters.
Authors:
; ; ;  [1] ;  [2] ;  [3]
  1. Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, Sichuan 621900 (China)
  2. Institute of Atmosphere Environment Security and Pollution Control, Jinan University, Guangzhou 510632 (China)
  3. School of Environmental and Chemical Engineering, Institute of Environmental Pollution and Health, Shanghai University, Shanghai 200444 (China)
Publication Date:
OSTI Identifier:
22392431
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 86; Journal Issue: 3; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; DETECTION; EV RANGE; ION SOURCES; MASS RESOLUTION; PLASMA; REFLECTION; SPECTRA; TIME-OF-FLIGHT MASS SPECTROMETERS