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Title: Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films

We describe a novel approach for calibration of the thermoreflectance coefficient, ideally suited for measurements in a vacuum thermostat, and present the high temperature thermoreflectance coefficients for several metals commonly encountered in electronic devices: gold, platinum, and aluminum. The effect of passivation on these metals is also examined, and we demonstrate the signal to noise ratio of a thermoreflectance measurement can be improved with informed selection of the dielectric layer thickness. Furthermore, the thermo-optic coefficients of the metals are extracted over a wide temperature range. The results presented here can be utilized in the optimization of experimental configurations for high temperature thermoreflectance imaging.
Authors:
;  [1] ;  [2] ;  [3]
  1. Baskin School of Engineering, University of California, Santa Cruz, California 95064 (United States)
  2. (United States)
  3. Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907 (United States)
Publication Date:
OSTI Identifier:
22392382
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 86; Journal Issue: 2; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ALUMINIUM; CALIBRATION; DIELECTRIC MATERIALS; ELECTRONIC EQUIPMENT; GOLD; OPTIMIZATION; PASSIVATION; PLATINUM; SIGNAL-TO-NOISE RATIO; TEMPERATURE DEPENDENCE; THERMOSTATS; THICKNESS; THIN FILMS