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Title: Feasibility of a 90° electric sector energy analyzer for low energy ion beam characterization

Abstract

A simple formula to calculate refocusing by locating the output slit at a specific distance away from the exit of 90° ion deflecting electric sector is given. Numerical analysis is also performed to calculate the ion beam trajectories for different values of the initial angular deviation of the beam. To validate the theory, a compact (90 mm × 5.5 mm × 32 mm) 90° sector ESA is fabricated which can fit through the inner diameter of a conflat 70 vacuum flange. Experimental results show that the dependence of resolution upon the distance between the sector exit and the Faraday cup agrees with the theory. The fabricated 90° sector electrostatic energy analyzer was then used to measure the space resolved ion energy distribution functions of an ion beam with the energy as low as 600 eV.

Authors:
;  [1];  [2]
  1. National Institute of Physics, University of the Philippines, Diliman, Quezon City 1101, Metro Manila (Philippines)
  2. Graduate School of Science and Engineering, Doshisha University, Kyotanabe, Kyoto 610-0321 (Japan)
Publication Date:
OSTI Identifier:
22392358
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 86; Journal Issue: 2; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ENERGY SPECTRA; EV RANGE; FARADAY CUPS; ION BEAMS; NUMERICAL ANALYSIS; RESOLUTION

Citation Formats

Mahinay, C. L. S.,, Ramos, H. J., and Wada, M. Feasibility of a 90° electric sector energy analyzer for low energy ion beam characterization. United States: N. p., 2015. Web. doi:10.1063/1.4908307.
Mahinay, C. L. S.,, Ramos, H. J., & Wada, M. Feasibility of a 90° electric sector energy analyzer for low energy ion beam characterization. United States. https://doi.org/10.1063/1.4908307
Mahinay, C. L. S.,, Ramos, H. J., and Wada, M. 2015. "Feasibility of a 90° electric sector energy analyzer for low energy ion beam characterization". United States. https://doi.org/10.1063/1.4908307.
@article{osti_22392358,
title = {Feasibility of a 90° electric sector energy analyzer for low energy ion beam characterization},
author = {Mahinay, C. L. S., and Ramos, H. J. and Wada, M.},
abstractNote = {A simple formula to calculate refocusing by locating the output slit at a specific distance away from the exit of 90° ion deflecting electric sector is given. Numerical analysis is also performed to calculate the ion beam trajectories for different values of the initial angular deviation of the beam. To validate the theory, a compact (90 mm × 5.5 mm × 32 mm) 90° sector ESA is fabricated which can fit through the inner diameter of a conflat 70 vacuum flange. Experimental results show that the dependence of resolution upon the distance between the sector exit and the Faraday cup agrees with the theory. The fabricated 90° sector electrostatic energy analyzer was then used to measure the space resolved ion energy distribution functions of an ion beam with the energy as low as 600 eV.},
doi = {10.1063/1.4908307},
url = {https://www.osti.gov/biblio/22392358}, journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 2,
volume = 86,
place = {United States},
year = {Sun Feb 15 00:00:00 EST 2015},
month = {Sun Feb 15 00:00:00 EST 2015}
}