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Title: Correction of absorption-edge artifacts in polychromatic X-ray tomography in a scanning electron microscope for 3D microelectronics

X-ray tomography is widely used in materials science. However, X-ray scanners are often based on polychromatic radiation that creates artifacts such as dark streaks. We show this artifact is not always due to beam hardening. It may appear when scanning samples with high-Z elements inside a low-Z matrix because of the high-Z element absorption edge: X-rays whose energy is above this edge are strongly absorbed, violating the exponential decay assumption for reconstruction algorithms and generating dark streaks. A method is proposed to limit the absorption edge effect and is applied on a microelectronic case to suppress dark streaks between interconnections.
Authors:
 [1] ;  [2] ;  [2] ; ;  [1] ;  [2] ;  [3]
  1. Université Grenoble Alpes, F-38000 Grenoble (France)
  2. (France)
  3. STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles (France)
Publication Date:
OSTI Identifier:
22392316
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 86; Journal Issue: 1; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ABSORPTION; ALGORITHMS; BEAMS; CORRECTIONS; MATERIALS; MICROELECTRONICS; SCANNING ELECTRON MICROSCOPY; TOMOGRAPHY; X RADIATION