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Title: Note: Development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source

Abstract

We report on production of volume-limited dot targets based on electron beam lithographic and sputtering technologies for use in efficient high brightness extreme ultraviolet microplasma sources. We successfully produced cylindrical tin (Sn) targets with diameters of 10, 15, and 20 μm and a height of 150 nm. The calculated spectrum around 13.5 nm was in good agreement with that obtained experimentally.

Authors:
; ;  [1];  [2];  [3]; ; ;  [4];  [5]
  1. Department of Advanced Interdisciplinary Sciences and Center for Optical Research (CORE), Utsunomiya University, Yoto 7-1-2, Utsunomiya, Tochigi 321-8585 (Japan)
  2. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577 (Japan)
  3. Graduate School of Science and Engineering for Research, University of Toyama, Toyama, Toyama 930-8555 (Japan)
  4. School of Physics, University College Dublin, Belfield, Dublin 4 (Ireland)
  5. Institute for Laser Technology, 2-6 Yamada-oka, Suita, Osaka 565-0871 (Japan)
Publication Date:
OSTI Identifier:
22392249
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 85; Journal Issue: 11; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; BRIGHTNESS; CYLINDRICAL CONFIGURATION; ELECTRON BEAMS; EXTREME ULTRAVIOLET RADIATION; HEIGHT; SPECTRA; SPUTTERING; TIN

Citation Formats

Dinh, Thanh Hung, E-mail: dinh@cc.utsunomiya-u.ac.jp, Suzuki, Yuhei, Hara, Hiroyuki, Higashiguchi, Takeshi, Hirose, Ryoichi, Ohashi, Hayato, Li, Bowen, Dunne, Padraig, O’Sullivan, Gerry, and Sunahara, Atsushi. Note: Development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source. United States: N. p., 2014. Web. doi:10.1063/1.4901934.
Dinh, Thanh Hung, E-mail: dinh@cc.utsunomiya-u.ac.jp, Suzuki, Yuhei, Hara, Hiroyuki, Higashiguchi, Takeshi, Hirose, Ryoichi, Ohashi, Hayato, Li, Bowen, Dunne, Padraig, O’Sullivan, Gerry, & Sunahara, Atsushi. Note: Development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source. United States. https://doi.org/10.1063/1.4901934
Dinh, Thanh Hung, E-mail: dinh@cc.utsunomiya-u.ac.jp, Suzuki, Yuhei, Hara, Hiroyuki, Higashiguchi, Takeshi, Hirose, Ryoichi, Ohashi, Hayato, Li, Bowen, Dunne, Padraig, O’Sullivan, Gerry, and Sunahara, Atsushi. 2014. "Note: Development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source". United States. https://doi.org/10.1063/1.4901934.
@article{osti_22392249,
title = {Note: Development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source},
author = {Dinh, Thanh Hung, E-mail: dinh@cc.utsunomiya-u.ac.jp and Suzuki, Yuhei and Hara, Hiroyuki and Higashiguchi, Takeshi and Hirose, Ryoichi and Ohashi, Hayato and Li, Bowen and Dunne, Padraig and O’Sullivan, Gerry and Sunahara, Atsushi},
abstractNote = {We report on production of volume-limited dot targets based on electron beam lithographic and sputtering technologies for use in efficient high brightness extreme ultraviolet microplasma sources. We successfully produced cylindrical tin (Sn) targets with diameters of 10, 15, and 20 μm and a height of 150 nm. The calculated spectrum around 13.5 nm was in good agreement with that obtained experimentally.},
doi = {10.1063/1.4901934},
url = {https://www.osti.gov/biblio/22392249}, journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 11,
volume = 85,
place = {United States},
year = {Sat Nov 15 00:00:00 EST 2014},
month = {Sat Nov 15 00:00:00 EST 2014}
}