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Title: Note: Development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source

We report on production of volume-limited dot targets based on electron beam lithographic and sputtering technologies for use in efficient high brightness extreme ultraviolet microplasma sources. We successfully produced cylindrical tin (Sn) targets with diameters of 10, 15, and 20 μm and a height of 150 nm. The calculated spectrum around 13.5 nm was in good agreement with that obtained experimentally.
Authors:
; ; ;  [1] ;  [2] ;  [3] ; ; ;  [4] ;  [5]
  1. Department of Advanced Interdisciplinary Sciences and Center for Optical Research (CORE), Utsunomiya University, Yoto 7-1-2, Utsunomiya, Tochigi 321-8585 (Japan)
  2. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577 (Japan)
  3. Graduate School of Science and Engineering for Research, University of Toyama, Toyama, Toyama 930-8555 (Japan)
  4. School of Physics, University College Dublin, Belfield, Dublin 4 (Ireland)
  5. Institute for Laser Technology, 2-6 Yamada-oka, Suita, Osaka 565-0871 (Japan)
Publication Date:
OSTI Identifier:
22392249
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 85; Journal Issue: 11; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; BRIGHTNESS; CYLINDRICAL CONFIGURATION; ELECTRON BEAMS; EXTREME ULTRAVIOLET RADIATION; HEIGHT; SPECTRA; SPUTTERING; TIN