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Title: Growth of microscopic cones on titanium cathodes of sputter-ion pumps driven by sorption of large argon quantities

Microscopic cones have been observed on titanium cathodes of sputter-ion pumps (SIPs) after pump operation. The cones were studied by means of scanning electron microscopy and energy dispersive x-ray analysis. Size and morphology of these cones are clearly correlated with the nature and the relative amount of each gas species pumped by each SIP during its working life. In particular, their growth was found to be fed by sputtering mechanisms, mostly during Ar pumping, and to be driven by the electromagnetic field applied to the Penning cells of each SIP. Experimental findings suggest that the formation and extent of such conic structures on cathode surfaces might play a leading role in the onset of phenomena typically related to the functioning of SIPs, e.g., the so-called argon instability.
Authors:
 [1] ; ;  [2] ;  [3] ;  [4]
  1. Dipartimento di Fisica, Università degli Studi di Milano, via Celoria, 16, 20133 Milano, Italy and SAES Getters S.p.A., viale Italia, 77, 20020 Lainate, Milan (Italy)
  2. SAES Getters S.p.A., viale Italia, 77, 20020 Lainate, Milan (Italy)
  3. INFN-LASA, via fratelli Cervi, 201, 20090 Segrate, Milan (Italy)
  4. Dipartimento di Fisica, Università degli Studi di Milano, via Celoria, 16, 20133 Milano, Italy and INFN-LASA, via fratelli Cervi, 201, 20090 Segrate, Milan (Italy)
Publication Date:
OSTI Identifier:
22392212
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 33; Journal Issue: 5; Other Information: (c) 2015 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ARGON; CATHODES; CONES; ELECTROMAGNETIC FIELDS; INSTABILITY; MORPHOLOGY; PUMPING; SCANNING ELECTRON MICROSCOPY; SORPTION; SPUTTERING; SPUTTER-ION PUMPS; TITANIUM; X RADIATION