New Zr-containing precursors for the atomic layer deposition of ZrO{sub 2}
Journal Article
·
· Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
- Digital Specialty Chemicals, 470 Coronation Drive, Toronto, Ontario M1E 4Y4 (Canada)
- Department of Chemistry, Carleton University, Ottawa, Ontario K1S 5B6 (Canada)
No abstract prepared.
- OSTI ID:
- 22392090
- Journal Information:
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Vol. 33, Issue 1; Other Information: (c) 2014 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 0734-2101
- Country of Publication:
- United States
- Language:
- English
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