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Title: New Zr-containing precursors for the atomic layer deposition of ZrO{sub 2}

No abstract prepared.
Authors:
; ;  [1] ; ;  [2]
  1. Digital Specialty Chemicals, 470 Coronation Drive, Toronto, Ontario M1E 4Y4 (Canada)
  2. Department of Chemistry, Carleton University, Ottawa, Ontario K1S 5B6 (Canada)
Publication Date:
OSTI Identifier:
22392090
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 33; Journal Issue: 1; Other Information: (c) 2014 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; DEPOSITION; LAYERS; PRECURSOR; ZIRCONIUM OXIDES