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Title: Generic trend of work functions in transition-metal carbides and nitrides

Transition-metal carbides and nitrides (TMCs and TMNs) are promising electrode materials for various electronic devices such as metal-oxide-semiconductor field-effect transistors and metal-insulator-metal capacitors. In this paper, the work functions of TMCs and TMNs are discussed systematically. Based upon the origin of the work function, the effect upon transition metal species by different periodic table groups is explained, carbides are compared with nitrides for the same transition metal, and the effect of carbon or nitrogen vacancies is discussed. In addition, a method to estimate the generic trend of the work function is proposed for TMC{sub x}, TMN{sub x}, TMC{sub 1−y}N{sub y} (transition metal carbonitrides), and TM{sub 1−z}TM′{sub z}C (alloy carbides)
Authors:
 [1]
  1. MANA Nanoelectronics Materials Unit, National Institute for Materials Science, Tsukuba, Ibaraki 305-0003 (Japan)
Publication Date:
OSTI Identifier:
22392086
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 32; Journal Issue: 6; Other Information: (c) 2014 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ALLOYS; CARBON; CARBONITRIDES; ELECTRODES; ELECTRONIC EQUIPMENT; FIELD EFFECT TRANSISTORS; NITROGEN; SEMICONDUCTOR MATERIALS; TRANSITION ELEMENTS; VACANCIES; WORK FUNCTIONS