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Title: In situ Raman spectroscopy for growth monitoring of vertically aligned multiwall carbon nanotubes in plasma reactor

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4902915· OSTI ID:22392073
; ; ; ; ;  [1]; ; ; ;  [2]
  1. GREMI, Université-CNRS, BP6744, 45067 Orléans Cedex 2 (France)
  2. Institute of Material Science, Chritian-Albrechts-University of Kiel, D-24143 Kiel (Germany)

Portable and highly sensitive Raman setup was associated with a plasma-enhanced chemical vapor deposition reactor enabling in situ growth monitoring of multi-wall carbon nanotubes despite the combination of huge working distance, high growth speed and process temperature and reactive plasma condition. Near Edge X-ray absorption fine structure spectroscopy was used for ex situ sample analysis as a complementary method to in situ Raman spectroscopy. The results confirmed the fact that the “alternating” method developed here can accurately be used for in situ Raman monitoring under reactive plasma condition. The original analytic tool can be of great importance to monitor the characteristics of these nanostructured materials and readily define the ultimate conditions for targeted results.

OSTI ID:
22392073
Journal Information:
Applied Physics Letters, Vol. 105, Issue 21; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English