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Title: In-situ scanning electron microscopy study of fracture events during back-end-of-line microbeam bending tests

This paper demonstrates the direct observation of crack initiation, crack propagation, and interfacial delamination events during in-situ microbeam bending tests of FIB milled BEOL structures. The elastic modulus and the critical force of fracture of the BEOL beam samples were compared for beams of different length and width.
Authors:
; ; ;  [1] ;  [1] ;  [2] ; ;  [3]
  1. Imec, Kapeldreef 75, 3001 Leuven (Belgium)
  2. (Belgium)
  3. Hysitron, Inc., 9625 West 76th Street, Eden Prairie, Minnesota 55344 (United States)
Publication Date:
OSTI Identifier:
22392067
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 105; Journal Issue: 21; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; BEAM OPTICS; BEAMS; CRACK PROPAGATION; SCANNING ELECTRON MICROSCOPY