In-situ scanning electron microscopy study of fracture events during back-end-of-line microbeam bending tests
- Imec, Kapeldreef 75, 3001 Leuven (Belgium)
- Hysitron, Inc., 9625 West 76th Street, Eden Prairie, Minnesota 55344 (United States)
This paper demonstrates the direct observation of crack initiation, crack propagation, and interfacial delamination events during in-situ microbeam bending tests of FIB milled BEOL structures. The elastic modulus and the critical force of fracture of the BEOL beam samples were compared for beams of different length and width.
- OSTI ID:
- 22392067
- Journal Information:
- Applied Physics Letters, Vol. 105, Issue 21; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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