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Title: Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks

A scalable approach for integrated photonic networks in single-crystal diamond using triangular etching of bulk samples is presented. We describe designs of high quality factor (Q = 2.51 × 10{sup 6}) photonic crystal cavities with low mode volume (V{sub m} = 1.062 × (λ/n){sup 3}), which are connected via waveguides supported by suspension structures with predicted transmission loss of only 0.05 dB. We demonstrate the fabrication of these structures using transferred single-crystal silicon hard masks and angular dry etching, yielding photonic crystal cavities in the visible spectrum with measured quality factors in excess of Q = 3 × 10{sup 3}.
Authors:
; ; ; ; ; ; ; ;  [1] ; ; ;  [2] ;  [3] ;  [4]
  1. Department of Electrical Engineering and Computer Science and Research Laboratory of Electronics, Massachusetts Institute of Technology, 77 Massachusetts Ave., Building 36, Cambridge, Massachusetts 02139 (United States)
  2. Brookhaven National Laboratory, Center for Functional Nanomaterials, Upton, New York 11973 (United States)
  3. Department of Electrical Engineering and Microelectronics Research Center, Technion, Haifa 32000 (Israel)
  4. Department of Physics and Solid State Institute, Technion, Haifa 32000 (Israel)
Publication Date:
OSTI Identifier:
22392049
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 105; Journal Issue: 21; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; DIAMONDS; ETCHING; MONOCRYSTALS; QUALITY FACTOR; SILICON; SUSPENSIONS; VISIBLE SPECTRA; WAVEGUIDES