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Title: Measurement of neutral gas temperature in a 13.56 MHz inductively coupled plasma

Measuring the temperature of neutrals in inductively coupled plasmas (ICP) is important as heating of neutral particles will influence plasma characteristics such as the spatial distributions of plasma density and electron temperature. Neutral gas temperatures were deduced using a non-invasive technique that combines gas actinometry, optical emission spectroscopy and simulation which is described here. Argon gas temperature in a 13.56 MHz ICP were found to fall within the range of 500 − 800 K for input power of 140 − 200 W and pressure of 0.05 − 0.2 mbar. Comparing spectrometers with 0.2 nm and 0.5 nm resolution, improved fitting sensitivity was observed for the 0.2 nm resolution.
Authors:
;  [1]
  1. Plasma Technology Research Centre, Department of Physics, University of Malaya, 50603 Kuala Lumpur (Malaysia)
Publication Date:
OSTI Identifier:
22391557
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1657; Journal Issue: 1; Conference: PERFIK 2014: National Physics Conference 2014, Kuala Lumpur (Malaysia), 18-19 Nov 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ARGON; COMPARATIVE EVALUATIONS; COMPUTERIZED SIMULATION; ELECTRON TEMPERATURE; EMISSION SPECTROSCOPY; MHZ RANGE; NEUTRAL PARTICLES; PLASMA DENSITY; PLASMA DIAGNOSTICS; PLASMA HEATING; PLASMA PRESSURE; PLASMA SIMULATION; RESOLUTION; SENSITIVITY; SPATIAL DISTRIBUTION; TEMPERATURE MEASUREMENT