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Title: Metal negative ion beam extraction from a radio frequency ion source

A metal ion source of magnetron magnetic field geometry has been designed and operated with a Cu hollow target. Radio frequency power at 13.56 MHz is directly supplied to the hollow target to maintain plasma discharge and induce self-bias to the target for sputtering. The extraction of positive and negative Cu ion beams have been tested. The ion beam current ratio of Cu{sup +} to Ar{sup +} has reached up to 140% when Ar was used as the discharge support gas. Cu{sup −} ion beam was observed at 50 W RF discharge power and at a higher Ar gas pressure in the ion source. Improvement of poor RF power matching and suppression of electron current is indispensable for a stable Cu{sup −} ion beam production from the source.
Authors:
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Publication Date:
OSTI Identifier:
22391466
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1655; Journal Issue: 1; Conference: NIBS 2014: 4. International Symposium on Negative Ions, Beams and Sources, Garching (Germany), 6-10 Oct 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ANIONS; ARGON IONS; BEAM CURRENTS; BEAM EXTRACTION; COPPER IONS; DESIGN; ELECTRIC DISCHARGES; ELECTRONS; ION BEAMS; ION SOURCES; MAGNETIC FIELDS; MAGNETRONS; MHZ RANGE; PLASMA; RADIOWAVE RADIATION; RF SYSTEMS; SPUTTERING