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Title: Initial results of a full kinetic simulation of RF H{sup −} source including Coulomb collision process

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.4916425· OSTI ID:22391407
; ; ;  [1]; ;  [2]
  1. Graduate School of Science and Technology, Keio University, Kanagawa (Japan)
  2. CERN, Geneva (Switzerland)

In order to evaluate Electron Energy Distribution Function (EEDF) more correctly for radio frequency inductively coupled plasma (RF-ICP) in hydrogen negative ion sources, the Electromagnetic Particle-In-Cell (EM-PIC) simulation code has been improved by taking into account electron-electron Coulomb collision. Binary collision model is employed to model Coulomb collision process and we have successfully modeled it. The preliminary calculation including Coulomb collision has been done and it is shown that Coulomb collision doesn’t have significant effects under the condition: electron density n{sub e} ∼ 10{sup 18} m{sup −3} and high gas pressure p{sub H{sub 2}} = 3 Pa, while it is necessary to include Coulomb collision under high electron density and low gas pressure conditions.

OSTI ID:
22391407
Journal Information:
AIP Conference Proceedings, Vol. 1655, Issue 1; Conference: NIBS 2014: 4. International Symposium on Negative Ions, Beams and Sources, Garching (Germany), 6-10 Oct 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
Country of Publication:
United States
Language:
English